摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type confocal laser microscope in which measurement error which occurs depending on the relative angle between the arrangement of a specimen and laser scanning is reduced. SOLUTION: The scanning type confocal laser microscope comprises: a laser light source 1; a two-dimensional scanning means 2 with which the specimen 0 is irradiated with laser light emitted from the light source 1; an objective lens 3 which converges the laser light emitted from the laser light source 1 to the specimen 0; a light receiving means 5 which receives reflected light from the specimen 0 and outputs it as a picture signal; a data collection means 6 which outputs picture data by collecting the picture data outputted from the light receiving means 5; a two-dimensional scanning control means 4 which controls the scanning region of the two-dimensional scanning means 2 according to the tilt of the object to be measured of the specimen 0; and an image forming means 7 which generates a displayed picture by segmenting the picture data outputted by the data collection means 6 by shifting the starting position of the image region in the scanning region according to the tilt of the object to be measured. COPYRIGHT: (C)2007,JPO&INPIT
|