| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing microlens capable of substantially increasing the number of gradation and, therefore, capable of manufacturing a microlens which is compact and has a large SAG amount even while using the conventional exposure device. <P>SOLUTION: In the method of manufacturing microlens, a gray scale mask 2A has six areas 2A1, 2A2 to 2A6 which are divided with a pitch (p) in the radial direction around a rotation-symmetric axis and have aperture ratios different from each other. Like the gray scale mask 2A, a gray scale mask 2B also has six areas 2B1, 2B2 to 2B6 which are divided with a pitch (p) in the radial direction and have aperture ratios different from each other. Dividing position of area is deviated, however, by p/2 with respect to the gray scale mask to the left side of the figure, that is, to the rotation-symmetric axis 5 side. By performing superposition exposure using the two sheets of gray scale masks, the gradation can be made into twelve gradations. <P>COPYRIGHT: (C)2007,JPO&INPIT |
