| 摘要 |
PROBLEM TO BE SOLVED: To facilitate air flow rate adjustment with high precision with respect to an air flow rate adjustment device for adjusting the flow rate of air discharged or sucked from an air source to a load side. SOLUTION: A valve box 21 is provided with a first air passage 24 connected to the load side, a second air passage 25 connected to an atmosphere side, and a third air passage 26 where the air passages 24 and 25 are joined and connected to a blower. The first air passage 24 and the third air passage 26 are connected by a first connection part 27, and the second air passage 25 and the third air passage 26 are connected by a second connection part 28. The first and second connection parts 27 and 28 are opened while interlocking with each other, by first and second connection windows 31 and 32 of an air flow rate adjustment plate 22 moving in directions of arrows B-C. A total sum of an opening area of the first connection part 27 opened by the first connection window 31 and that of the second connection part 28 opened by the second connection window 32 is usually made constant. COPYRIGHT: (C)2007,JPO&INPIT
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