发明名称 |
DOUBLE SIDE PROBING OF SEMICONDUCTOR DEVICES |
摘要 |
A probe head for testing the properties of a semiconducting device (10) under test including a dielectric film (24) supporting at least one semiconducting device (10) under test with a support frame (26) tautly supporting the dielectric film (24). A first support (40) positions a first probe (28) for electrically contacting a first side (16) of the semiconducting device (10) under test and a second support (34), having a actuator to move a second probe (30) between a first position (P1) and a second position (P2), positions second probe (30) with the second position (P2) being for electrically contacting an opposing second side (18) of the semiconductor device under test. |
申请公布号 |
WO2005098460(A3) |
申请公布日期 |
2006.10.26 |
申请号 |
WO2005US11206 |
申请日期 |
2005.03.30 |
申请人 |
WENTWORTH LABORATORIES, INC. |
发明人 |
HOPE, JEREMY;OVERALL, ADRIAN, R.;FITZPATRICK, JOHN, J. |
分类号 |
G01R31/02;G01R1/067;G01R1/073;G01R31/26 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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