| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz crystal microbalance sensor using an oscillator easy in temperature compensation, capable of high-precision QCM (=quartz crystal microbalance) and giving small influence on the oscillation frequency by external factors. SOLUTION: The quartz crystal microbalance sensor, provided with an absorbing film on the surface of electrode of the quartz crystal oscillator, in which the mass absorbed on the film is detected as the changes in the oscillation frequency, uses a SC-Cut quartz crystal oscillator. By using the SC-Cut oscillator for the quartz crystal microbalance sensor, the frequency deviation becomes small caused by the external stress, such as thermal shock etc., and the C-Mode oscillation imparting frequency information and B-Mode oscillation imparting the temperature information can be switched and oscillated, thereby, high-accuracy mass measurement can be realized. Consequently, a prediction that the QCM measurement can be made high in accuracy and the fields of application can be widened, can be predicted. COPYRIGHT: (C)2007,JPO&INPIT
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