| 摘要 |
In a mask holder with a substrate support (2) for receiving a substrate (3) (specifically of large area) during a vacuum coating procedure, the support includes magnet(s) (4) on the reverse side (opposite the substrate receiving region) separated from each other and located around or along the edge of the substrate receiving region. The mask (6) has a frame of magnetic material, so that it can be held in position relative to the substrate by the magnets. |
