| 摘要 |
An apparatus and a method for positioning a mask are provided to be operated for a changeable mask by guaranteeing a safe and reliable arrangement of the mask in a movable substrate. A method for positioning a mask includes the steps of: holding a mask(6) by an electromagnet(7) on a holding assembly(8) to be transferred to a predetermined direction through a first transfer unit(5); providing a substrate(3) on a substrate carrier in a rear side plane of magnets arranged around a substrate receiving unit; determining a relative position between the mask(6) and the substrate(3); arranging the substrate(3) and the mask(6) by an operation of the first transfer unit(5) so that the mask(6) is relatively moved to the substrate(3) if a direction error occurs; arranging the mask(6) on the substrate(3) through the first transfer unit(5) so that the mask(6) is moved to a vertical direction to the substrate(3); and moving a substrate carrier(2) to the mask direction through holding of the mask(6) on the substrate(3) by a second transfer unit(18), the electromagnet(7) and a magnet(4) of the substrate carrier.
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