| 摘要 |
A method of making light emitting diodes comprising:
preparing an transparent substrate (100) having a first surface and a second surface opposing the first surface;
forming successively a first epitaxial layer (140), an active layer (160), and a second epitaxial layer (180) on the first surface of the transparent substrate;
forming a first electrode (240) on the second epitaxial layer;
forming a second electrode (250) on the first epitaxial layer; and
forming a reflective layer (200) on the second surface of the transparent substrate;
wherein a transparent conductive layer (220) comprising ITO (indium-tin-oxide) is formed between the second epitaxial layer (180) and the first electrode (240), and
a first pad (260) comprising Au is formed on the first electrode (240), the first electrode includes one of Ni/Au, Pd/Au, Pd/Ni and Pt. |
