Process for producing monomer

摘要

A process for producing a monomer for resists represented by the following general formula 1: wherein R¹ represents hydrogen or an optionally substituted alkyl group; R², R³ and R⁴ each independently represent hydrogen or a substituent; and X, Y and Z each independently represent a direct bond or an optionally substituted alkylene group with 1 to 3 chain members, the process comprising carrying out esterification or transesterification in the presence of a biocatalyst.