PROJECTION OBJECTIVE HAVING A HIGH APERTURE AND A PLANAR END SURFACE

摘要

A projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective suitable for microlithography projection exposure machines has a plurality of optical elements transparent for radiation at an operating wavelength of the projection objective. At least one optical element is a high-index optical element made from a high-index material with a refractive index n >= 1.6 at the operating wavelength.