发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a reliable semiconductor device and a method for efficiently manufacturing this semiconductor device. <P>SOLUTION: The semiconductor device includes a semiconductor substrate 10; an insulating layer 20 that is provided over the semiconductor substrate 10, and has a groove 22 formed in a second plane on the side opposite to a first plane opposed to the semiconductor substrate 10; and a conductor 30 provided over the insulating layer 20. The conductor 30 includes a wiring 32 so formed that it is in contact with the bottom face 28 and the side faces 29 of the groove 22. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006287095(A) 申请公布日期 2006.10.19
申请号 JP20050107315 申请日期 2005.04.04
申请人 SEIKO EPSON CORP 发明人 HANAOKA TERUNAO
分类号 H01L23/12 主分类号 H01L23/12
代理机构 代理人
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