OILFREE SCROLL TYPE VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide a highly convenient oilfree scroll type vacuum pump having a long service life and reducing electric power consumption. SOLUTION: This oilfree scroll type vacuum pump is provided with a first spiral scroll wrap erected from an end plate of a turning scroll; a second spiral scroll wrap erected from an end plate of a fixed scroll; chip seal grooves provided at tips of the first and second spiral scroll wraps; and chip seals arranged in the chip seal grooves. By revolving the turning scroll with respect to the fixed scroll, gas between the turning scroll and the fixed scroll is sequentially compressed from the outer peripheral side to the inner peripheral side. A flow rate adjusting mechanism is provided in a gas ballast mechanism. COPYRIGHT: (C)2007,JPO&INPIT