| 摘要 |
PROBLEM TO BE SOLVED: To provide a hole roughness measuring technique and a device thereof capable of assessing roughness easily by determining an optimum approximating curve even for out-of-round hole. SOLUTION: By irradiating energy line to a hole formed on an object to be measured to detect the reflected energy generated at the object to be measured, edges are detected from the center of hole in a radial pattern, the edge coordinates of the detected edges are convert to aθ-r plane, frequency components are determined by means of Fourier transformation on theθ-r plane, an approximating curve of an approximated hole of the hole on theθ-r plane is formed on the basis of the frequency components, and lastly the hole roughness can be measured from difference to the edge coordinates detecting the approximating curve concerned. COPYRIGHT: (C)2007,JPO&INPIT
|
