| 摘要 |
PROBLEM TO BE SOLVED: To inspect and repair a circuit defect precisely and quickly. SOLUTION: An apparatus for inspecting and repairing the circuit defect has a base 101; a substrate-supporting platform 200 mounted on the base 101; a contact inspection module 300, having at least one contact probe and a first driving system that drives at least one contact probe for contacting the circuits formed on the glass substrate, and thereby inspects a circuit defect; a non-contact inspection module 400, having at least one non-contact sensor and a second driving system that drives at least one non-contact sensor to inspect the circuit defects in a non-contact manner for use in determining the location of the circuit defect, in cooperation with the contact inspection module 300; and a laser repair module 500, having a laser head and a third driving system that drives the laser head to travel to the circuit defect and repair the circuit defect. A method for inspecting and repairing circuit defects is also disclosed therewith. COPYRIGHT: (C)2007,JPO&INPIT
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