| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of obtaining a large distortion by its small driving voltage, and to provide a liquid injection head, and further, provide a liquid injection apparatus. <P>SOLUTION: The piezoelectric element has a piezoelectric film 70 made of lead titanate zirconate (PZT) and oriented preferentially to the (100) face of a perovskite type crystal, and has upper and lower electrodes 80, 60 of sandwiching the piezoelectric film 70 between them. Further, the position of its X-ray diffracting peak originated from the (100) face of the piezoelectric film 70 falls within the scope of 2θ=21.79 to 21.88°. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
