| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film temperature sensor which can achieve high precision output characteristics (voltage/temperature) without varying the characteristics of a thermistor by employing a voltage output arrangement having three terminals combining a thermistor and a resistor and adjusting the characteristics of resistance of a thermistor formed on a thermally insulated portion by a resistor formed on the outside of the thermal insulation portion and capable of trimming, and to provide a method for adjusting the characteristics thereof. SOLUTION: The thin film temperature sensor 10b has through holes 9a-9d formed in a substrate 1b and a portion insulated thermally from other regions of the substrate 1b. The thin film temperature sensor 10b also has a heat-sensitive resistor portion 6 formed on the thermally insulated portion, and a resistor portion 3b formed on the substrate 1b and capable of trimming the resistance. Furthermore, a terminal electrode 5a being connected with one terminal of the resistor portion 3b, a terminal electrode 5b being connected with the other terminal of the resistor portion 3b and one terminal of the heat-sensitive resistor portion 6, and a terminal electrode 5c being connected with the other terminal of the heat-sensitive resistor portion 6 are formed on the substrate 1b. COPYRIGHT: (C)2007,JPO&INPIT
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