| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid injection head which surely prevents a discharge failure such as clogging of a nozzle with foreign matters, and is provided with a flow path forming substrate and a reservoir forming substrate well joined to each other, and also to provide manufacturing method thereof. SOLUTION: The liquid injection head is provided with: the flow path forming substrate 10 where a pressure chamber 12 communicating with a nozzle opening to discharge a liquid droplet is formed; a piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric body layer 70 and an upper electrode 80, which are provided on one surface of the flow path forming substrate 10 through an oscillating plate; and the reservoir forming substrate 30 which is joined to the flow path forming substrate 10 with an adhesive 35 and has a reservoir part 31. The head also has a joining layer 98 consisting of an oxidized metal at least in a part of joining area of the flow path forming substrate 10 with the reservoir forming substrate 30 so that the reservoir forming substrate 30 is joined on the joining layer 98. COPYRIGHT: (C)2007,JPO&INPIT
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