TEMPERATURE CONTROL APPARATUS

摘要

A method of controlling the temperature of an electronic circuit or other moisture sensitive component of a vacuum pump is described. The method comprises the steps of flowing a cooling fluid through a component cooling circuit to cool the component, monitoring one of the air humidity and the ambient temperature proximate the component, monitoring the temperature of the cooling circuit, and controlling the supply of cooling fluid to the cooling circuit in dependence on the monitored parameters so that the temperature of the cooling circuit decreases with decreasing ambient temperature whilst maintaining the temperature of the component above the dew point at the monitored ambient temperature.