ULTRA-PRECISION OPTICAL ELEMENT ALIGNMENT SYSTEM

摘要

An ultra-precision optical element alignment system is provided to improve the precision of position by removing errors using a central computer for applying a tertiary interpolation capable of compensating a hysteresis error. An ultra-precision optical element alignment system includes a transfer plate(12), an X-axis flexor(8) connected with the transfer plate through a screw connecting portion, a Y-axis flexor(9) connected with the X-axis flexor through a pin connecting portion, a Z-axis flexor(10) connected with the Y-axis flexor through the pin connecting portion, a base(11) connected with the Z-axis flexor through the screw connecting portion, three piezoelectric actuators for generating an ultra-precision displacement against the X, Y, and Z-axis flexors, a capacitor type sensor(18) for detecting three freedom degree positions of the ultra-precision multi-axes stage composed of the piezoelectric actuators, the X, Y, and Z axis flexors, an optical element(21), an optical parameter(24), an optical fiber(23) and a central computer(26) for controlling precisely the piezoelectric actuators by applying a predetermined tertiary interpolation.