摘要 |
PROBLEM TO BE SOLVED: To obtain a sintered getter film having desired peel strength by comparatively low sintering temperatures. SOLUTION: In this manufacturing method of a getter film for an electron tube, which is formed by making the getter film 25 containing at least one metal selected from Zr, Ti, and Ta adhere to a body 22 to be formed with the getter film, the getter film of a metal is formed by making hydride powder of the metal adhere to the body to be formed with the getter film and by making it sinter. Therefore, a temperature for sintering can be lowered compared with a single substance of metal powder, and a sintering furnace can be improved as to its preservation, maintenance, and life. COPYRIGHT: (C)2007,JPO&INPIT
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