发明名称 Forming closely spaced electrodes
摘要 The present invention provides an apparatus and a method of fabricating the apparatus. The apparatus comprises a substrate having a planar surface and first and second electrodes located on the planar surface. The first electrode has a top surface and a lateral surface, and the lateral surface has an edge near or in contact with the substrate. An electrode insulating layer is located on the top surface and a self-assembled layer located on the lateral surface. The second electrode is in contact with both the self-assembled layer and the electrode insulating layer.
申请公布号 US7119356(B2) 申请公布日期 2006.10.10
申请号 US20040803244 申请日期 2004.03.18
申请人 PRINCETON UNIVERSITY 发明人 BAO ZHENAN;ZHENG JIE;STURM JAMES C.;GRAVES-ABE TROY
分类号 H01L29/06;H01L51/40 主分类号 H01L29/06
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