Apparatus and method for measuring thickness and profile of transparent thin-film by white-light interferometry,申请号KR20050092978-传众专利搜索

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发明名称	Apparatus and method for measuring thickness and profile of transparent thin-film by white-light interferometry
摘要
申请公布号	KR100631060(B1)	申请公布日期	2006.10.04
申请号	KR20050092978	申请日期	2005.10.04
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
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