Determining feasibility of IC edits

摘要

A computer method of analyzing an integrated circuit ("IC") masked design data, comprising grouping into a cluster areas of layers preceding a target metal layer that are suitable for milling, deleting portions of the target metal layer that do not meet minimum tool spacing requirements to produce a modified metal layer, deleting portions of the modified metal layer that do not meet minimum design rule width requirements to produce a final metal layer, and comparing the final metal layer and the cluster to identify common areas.