| 摘要 |
PROBLEM TO BE SOLVED: To obtain a small magnetic sensor which can detect the strength of a magnetic field in three axial directions by arranging three or more giant magnetoresistive elements on one sheet of substrate. SOLUTION: On the flat surface of a thick film formed on a substrate 1, four giant magnetoresistive elements 2a-2d constituting an X-axis sensor and four giant magnetoresistive elements 3e-3h constituting a Y-axis sensor are arranged. A Z-axis sensor is constituted of four giant magnetoresistive elements 4i-4l formed on the bevels of a plurality of grooves which are formed by etching a part of the thick film. COPYRIGHT: (C)2006,JPO&NCIPI
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