| 摘要 |
PROBLEM TO BE SOLVED: To enhance convergency of a primary ion, and to reduce a work function on a sample surface to enhance a secondary ionization rate further, as to a method and an instrument for measuring a depth-directional element distribution. SOLUTION: This method/instrument uses a metal ion having the convergency higher than Ar as a primary ion species, and an oxide 2 of an element reactive with a sample 1 is irradiated with a primary ion 3 under the condition where the oxide 2 is deposited on the surface of the sample 1, so as to generate a secondary ion 4. COPYRIGHT: (C)2006,JPO&NCIPI
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