| 摘要 |
PROBLEM TO BE SOLVED: To provide an attraction method using an electrostatic attraction device which attracts an insulating film without space. SOLUTION: An attraction device 10 has an insulating electrode substrate 11 and a plurality of electrodes 21 to 36 disposed concentrically in the surface of the electrode substrate 11. Adjacent two of the electrodes 21 to 36 are made one set, and a large voltage is applied gradually every fixed time from an inner set toward an outer set. The surface is divided into a plurality of regions A to D, and a voltage can be applied for each of the regions A to D. When an insulating film-like attraction object is attracted, a loose space is extruded to an outside, and adhesion between the attraction object and the attraction device is improved. COPYRIGHT: (C)2006,JPO&NCIPI |
