| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a defect due to redeposit of a coated substance in a spin coat method which is implemented to solve a problem of depositing a solid substance solidified with a coating liquid scattered in a device to a coated surface in the coating by the spin coat method. <P>SOLUTION: A rotary coating device includes a rotary table rotating in a state of supporting a substrate horizontally and coating the coating liquid held on the substrate; a driving part for rotationally driving the rotary table; a control part for controlling the driving part; a cover member surrounding the supported substrate and the rotary table, and extending to a higher position than the substrate; and a coating liquid receiving part placed inside the cover member and holding an inactive liquid to the coating liquid. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
