| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate processing equipment having a first processing section for processing a plurality of sheets of substrate collectively, and a second processing section for processing the substrates sheet by sheet and capable of processing the substrate in any processing section. SOLUTION: The substrate processing equipment comprises a section 1 for containing a hoop F which contains a plurality of sheets of substrate W, a first processing section 3 for processing a plurality of sheets of substrate W collectively, and a second processing section 5 for processing the substrates W sheet by sheet. The substrate W can be processed by any one of a system for processing a plurality of sheets of substrate W collectively or a system for processing the substrates W sheet by sheet. Since the substrate is carried between the first processing section 3 and the second processing section 5 through the containing section 1, the first processing section 3 and the second processing section 5 can be controlled independently from each other. Furthermore, dead space is eliminated and footprint is reduced by arranging the second processing section 5 between the first processing section 3 and a mounting stand 9. COPYRIGHT: (C)2006,JPO&NCIPI
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