METHOD FOR DECHUCKING SUBSTRATE FROM ESC

摘要

A substrate dechucking method is provided to prevent the damage of a substrate by checking exactly an electrostatic force release point. A predetermined DC(Direct Current) power source is stopped, wherein the predetermined DC power source is applied to a predetermined electrode of an electrostatic chuck(S120). A pressure value of cooling gas supplied to a predetermined portion between the electrostatic chuck and a substrate is reset to a preliminary value. The cooling gas is continuously supplied to the predetermined portion in order to keep the pressure value of the cooling gas in the preliminary value range. At this time, the flow rate of the cooling gas is measured(S130). When the flow rate of the cooling gas becomes over a reference value, the substrate is unloaded from the electrostatic chuck(S150).