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发明名称
Polishing Pad and Polishing Device
摘要
申请公布号
KR100628854(B1)
申请公布日期
2006.09.27
申请号
KR20017005781
申请日期
2001.05.08
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
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代理人
主权项
地址
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