发明名称 |
Field emission source with plural emitters in an opening |
摘要 |
A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
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申请公布号 |
US7112920(B2) |
申请公布日期 |
2006.09.26 |
申请号 |
US20040827813 |
申请日期 |
2004.04.20 |
申请人 |
NATIONAL INSTUTUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY |
发明人 |
YAMAMOTO MAKOTO;KOGA KEISUKE;SHIOTA AKINORI;KANEMARU SEIGO;NAGAO MASAYOSHI |
分类号 |
H01J63/02;H01J1/02;H01J1/304;H01J1/46;H01J1/62;H01J31/12;H01J63/04 |
主分类号 |
H01J63/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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