| 摘要 |
Disclosed is an ultra-low temperature, dual-compressor ( 114,144 ), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system ( 110 ) in combination with a closed-loop gas secondary refrigeration loop ( 112 ). The ultra-low temperature, dual-compressor ( 114,144 ), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object ( 158 ), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode. |
