Polymer, Resist Composition and Patterning Process,申请号KR20010059520-传众专利搜索

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法人/股东/高管

发明名称	Polymer, Resist Composition and Patterning Process
摘要
申请公布号	KR100626259(B1)	申请公布日期	2006.09.22
申请号	KR20010059520	申请日期	2001.09.26
申请人		发明人
分类号	G03F7/039;C08F30/08;C08F32/00;C08K5/00;C08L101/10;G03F7/004;G03F7/075;G03F7/40;H01L21/027	主分类号	G03F7/039
代理机构		代理人
主权项
地址

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