| 摘要 |
PROBLEM TO BE SOLVED: To provide a position control stage apparatus capable of accurately maintaining the flatness and levelness of a stage and performing cost-reduction, and a substrate treatment apparatus. SOLUTION: A cast iron is used for the stage 13, a movement table 30 placed with a pattern to be formed body P is provided on an upper surface 13a and the stage 13 is supported by six pneumatic actuators 12A-12F for lifting/driving it in a vertical direction. Further, an attitude controller 121 independently controls/drives the respective pneumatic actuators 12A-12F based on an output of a position sensor S1 such that the upper surface 13a of the stage 13 maintains a predetermined position. COPYRIGHT: (C)2006,JPO&NCIPI
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