| 摘要 |
A microelectromechanical systems (MEMS) apparatus ( 100 ) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member ( 101 ) that can be stopped at either of at least two positions by electrically neutral stops ( 105, 107 ). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.
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