发明名称 TECHNIQUE FOR THE GROWTH OF PLANAR SEMI-POLAR GALLIUM NITRIDE
摘要 A method for growing planar, semi-polar nitride film on a miscut spinel substrate, in which a large area of the planar, semi-polar nitride film is parallel to the substrate's surface. The planar films and substrates are: (1) {101 1 } gallium nitride (GaN) grown on a {100} spinel substrate miscut in specific directions, (2) { 1013 } gallium nitride (GaN) grown on a {110} spinel substrate, (3) { 1122 } gallium nitride (GaN) grown on a { 1 100 } sapphire substrate, and (4) { 1013 } gallium nitride (GaN) grown on a { 1 1 00 } sapphire substrate.
申请公布号 WO2006099138(A2) 申请公布日期 2006.09.21
申请号 WO2006US08595 申请日期 2006.03.10
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;BAKER, TROY, J.;HASKELL, BENJAMIN, A.;FINI, PAUL, T.;DENBAARS, STEVEN, P.;SPECK, JAMES, S.;NAKAMURA, SHUJI 发明人 BAKER, TROY, J.;HASKELL, BENJAMIN, A.;FINI, PAUL, T.;DENBAARS, STEVEN, P.;SPECK, JAMES, S.;NAKAMURA, SHUJI
分类号 H01L29/15;H01L31/0312;H01L33/00 主分类号 H01L29/15
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