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发明名称
VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERANORDNUNG MIT EINER ANTIREFLEKTIERENDEEN ÄTZSTOPPSCHICHT
摘要
申请公布号
DE69833262(T2)
申请公布日期
2006.09.21
申请号
DE1998633262T
申请日期
1998.08.28
申请人
ADVANCED MICRO DEVICES INC.
发明人
WANG, FEI;FOOTE, K.;CAGAN, R.;GUPTA, SUBHASH
分类号
H01L21/28;H01L21/314;H01L21/027;H01L21/312;H01L21/318;H01L21/336;H01L21/768;H01L21/8244;H01L23/522;H01L27/11;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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