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发明名称
OXIDANT FOR CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION AND METHOD FOR PRODUCING THE SAME
摘要
申请公布号
KR20060099700(A)
申请公布日期
2006.09.20
申请号
KR20050021083
申请日期
2005.03.14
申请人
DONGJIN SEMICHEM CO., LTD.
发明人
PARK, JONG DAI;KIM, DONG WAN
分类号
C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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