Optical proximity correction based on edge fragment correlation

摘要

Aspects of the invention relate to techniques for applying edge fragment correlation information to optical proximity correction. Conventional edge adjustment values for the edge fragments are first derived from edge placement error values. Neighbor-aware edge adjustment values for the edge fragments are then computed based on the edge placement error values, the conventional edge adjustment values and edge fragment correlation information. The computation comprises: calculating pseudo edge placement error values by subtracting neighboring edge movement contribution values from the edge placement error values and calculating the neighbor-aware edge adjustment values based on the pseudo edge placement error values. The computed neighbor-aware edge adjustment values are combined with conventional edge adjustment values and the edge fragments are adjusted accordingly. The process may be repeated for a number of times.

主权项

1. A method, executed by at least one processor of a computer, comprising:
determining, by at least one processor of a computer, edge placement error values for edge fragments in a layout design based on simulation; deriving conventional edge adjustment values for the edge fragments from the edge placement error values; and computing neighbor-aware edge adjustment values for the edge fragments based on the edge placement error values, the conventional edge adjustment values and edge fragment correlation information, the computing comprising:
calculating pseudo edge placement error values by subtracting neighboring edge movement contribution values from the edge placement error values, the neighboring edge movement contribution values being determined by assuming that neighboring edge fragments determined based on a predetermined condition are moved according to the conventional edge adjustment values, andcalculating the neighbor-aware edge adjustment values based on the pseudo edge placement error values.