发明名称 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATION THE SAME
摘要 <p>The device has a semiconductor substrate including a set of active regions separated by a set of trenches in the semiconductor substrate. A gate insulation film is formed over the semiconductor substrate, where a portion of the gate insulation film fills a portion of the trenches. A conductive gate film (60) is formed over the gate insulation film, and a metal film (70) generates a high potential barrier between the conductive gate film and a blocking insulation film. An independent claim is also included for a method of fabricating a semiconductor memory device.</p>
申请公布号 KR20060099690(A) 申请公布日期 2006.09.20
申请号 KR20050021070 申请日期 2005.03.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, CHANG HYUN
分类号 H01L27/115 主分类号 H01L27/115
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