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发明名称
管靶材
摘要
本发明系关于一种具有一圆柱载体管及提供于载体管外表面上之至少一个靶材管之管靶材,其具有一连接层提供于靶材管与载体管之间,且该连接层为导电性的且具有大于90%之湿润程度。
申请公布号
TW200632121
申请公布日期
2006.09.16
申请号
TW094144186
申请日期
2005.12.14
申请人
威西赫罗斯公司
发明人
克里司多福 赛门;马丁 琼洛特;马可斯 琼堤耶斯;马丁 维杰特;拉斯 贾斯克
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
陈长文
主权项
地址
德国
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