| 摘要 |
A microscope includes an optical element provided with an anti-reflection film applied thereto. The anti-reflection film has the following layered structure: having first to sixth layers of films, in order from the surface of the optical element, formed of a high-refractive-index material for each of the first, third and fifth layers, a low-refractive-index material or a middle-refractive-index material for each of the second and fourth layers, and a low-refractive-index material for the sixth layer, with a range of the optical film-thickness nd of each layer in reference to the design wavelength lambda being "(0.13~0.35)xlambda/4" for the first layer, "(0.18~0.75)xlambda/4" for the second layer, "(0.28~2.31)xlambda/4" for the third layer, "(0.26~0.92)x60 /4" for the fourth layer, "(0.20~0.37)xlambda/4" for the fifth layer, and "(1.09~1.18)xlambda/4" for the sixth layer.
|
