| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of manufacturing an optical disk in which both stampers made of metal and made of resin can be used and which is excellent in practicality. SOLUTION: The apparatus of manufacturing the optical disk includes: a transfer process in which a recording resin layer in which the center pin 11 is lowered for the stamper 18 which is absorbed and held fixedly to a rotation table T7 and on which UV curable resin 36 is applied and the substrate 29 is stuck on the stamper 18 and an information recording plane of the stamper 18 is transferred to the substrate 29 surface by curing the resin 36 by curing the resin 36 UV irradiation is formed; and a peel-off process in which a recording resin layer integrated substrate 29 is peeled off from the stamper 18 by rise of the center pin 11 and discharge of air from an air discharge hole 24. In the apparatus, a stamper placing plane of the table T is constituted of an absorption plate 174 made of ceramics, a negative pressure room 176 is provided at an absorption plate lower plane side in the table T. Negative pressure absorption force generated at an upper plane of the table T (absorption plate 174) is uniformed over the whole placing plane, the information recording plane is not deformed by absorption holding even if it is thin resin stamper, the information recording plane of the stamper can be transferred to a resin layer 41. COPYRIGHT: (C)2006,JPO&NCIPI
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