| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head improved in CMP accuracy by preparing a stopper film. SOLUTION: The stopper film 8 consisting of Si oxide or diamond-like carbon on is formed on a 1st alumina film 7 formed on a magnetic substance pattern 6, and a 2nd alumina film 9 is formed on the stopper film. After that, polishing is performed up to the stopper film 8 by CMP. The method for manufacturing the thin film magnetic head includes a process for forming a 2nd magnetic substance pattern 9 on an upper part of a flat surface formed by CMP processing. COPYRIGHT: (C)2006,JPO&NCIPI
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