Chemical sensor using piezoelectric microcantilever and manufacturing method thereof,申请号KR20040021693-传众专利搜索

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发明名称	Chemical sensor using piezoelectric microcantilever and manufacturing method thereof
摘要
申请公布号	KR100620255(B1)	申请公布日期	2006.09.13
申请号	KR20040021693	申请日期	2004.03.30
申请人		发明人
分类号	G01N27/00	主分类号	G01N27/00
代理机构		代理人
主权项
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