A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.
申请公布号
EP1700089(A1)
申请公布日期
2006.09.13
申请号
EP20040814715
申请日期
2004.12.15
申请人
HONEYWELL INTERNATIONAL INC.
发明人
WOOD, ROLAND, A.;YOUNGNER, DANIEL, W.;HIGASHI, ROBERT, E.;COLE, BARRETT, E.