METHOD FOR REMOVING OXIDIZING GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for removing an oxidizing gas containing fluorine gas or oxygen fluoride from fluorine-containing exhaust gas in high efficiency when exhaust gas is treated by a wet process.

SOLUTION: The method for removing the oxidizing gas containing fluorine gas and/or oxygen fluoride from fluorine-containing exhaust gas comprises a step of using a liquid absorbent containing a mixture of a basic compound with a sulfur-based reducing agent selected from the group consisting of thiosulfate, sulfide and hydrosulfide.

COPYRIGHT: (C)2006,JPO&NCIPI