| 摘要 |
<p>The pressure sensor has two diaphragms (101,102) of equal size and shape, fixedly connected together, one on top of the other. At least one electromechanical transducer converts the pressure-dependent deflection of one of the diaphragms into an electrical signal. The diaphragms are preferably mirror-symmetrically preformed to include a cavity between them. Independent claims are included for a combination sensor for pressure measurement in vacuums, a method of operating combination sensors, a method of manufacturing combination sensors, and a method of testing a reference vacuum in the cavity of absolute pressure sensors.</p> |
