,申请号JP20000145897-传众专利搜索

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发明名称
摘要
申请公布号	JP3818826(B2)	申请公布日期	2006.09.06
申请号	JP20000145897	申请日期	2000.05.18
申请人		发明人
分类号	G01R31/28;H01L21/66;H01L21/3205;H01L21/60;H01L23/52	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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