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发明名称
MEMS SWITCH AND MANUFACTURING METHOD OF IT
摘要
申请公布号
KR100620516(B1)
申请公布日期
2006.08.29
申请号
KR20050064798
申请日期
2005.07.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JONG SEOK;SONG, IN SANG;LEE, SANG HUN;KWON, SANG WOOK;KIM, DUCK HWAN;PARK, YUN KWON;JEONG, HEE MOON;HONG, YOUNG TACK;KIM, CHE HEUNG;YUN, SEOK CHUL;NAM, KUANG WOO
分类号
H01L29/00
主分类号
H01L29/00
代理机构
代理人
主权项
地址
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